Приказ основних података о документу

dc.creatorLazović, Saša
dc.creatorPuač, Nevena
dc.creatorSpasić, Kosta
dc.creatorMalović, Gordana
dc.creatorCvelbar, Uros
dc.creatorMozetić, Miran
dc.creatorRadetić, Maja
dc.creatorPetrović, Zoran Lj
dc.date.accessioned2021-03-10T12:13:19Z
dc.date.available2021-03-10T12:13:19Z
dc.date.issued2013
dc.identifier.issn0022-3727
dc.identifier.urihttp://TechnoRep.tmf.bg.ac.rs/handle/123456789/2489
dc.description.abstractWe have developed a large-volume low-pressure cylindrical plasma reactor with a size that matches industrial reactors for treatment of textiles. It was shown that it efficiently produces plasmas with only a small increase in power as compared with a similar reactor with 50 times smaller volume. Plasma generated at 13.56MHz was stable from transition to streamers and capable of long-term continuous operation. An industrial-scale asymmetric cylindrical reactor of simple design and construction enabled good control over a wide range of active plasma species and ion concentrations. Detailed characterization of the discharge was performed using derivative, Langmuir and catalytic probes which enabled determination of the optimal sets of plasma parameters necessary for successful industry implementation and process control. Since neutral atomic oxygen plays a major role in many of the material processing applications, its spatial profile was measured using nickel catalytic probe over a wide range of plasma parameters. The spatial profiles show diffusion profiles with particle production close to the powered electrode and significant wall losses due to surface recombination. Oxygen atom densities range from 10(19) m(-3) near the powered electrode to 10(17) m(-3) near the wall. The concentrations of ions at the same time are changing from 10(16) to the 10(15) m(-3) at the grounded chamber wall.en
dc.publisherIOP Publishing Ltd, Bristol
dc.relationSlovenian Research Agency (ARRS)Slovenian Research Agency - Slovenia
dc.relationSlovenian Human Resources Development and Scholarship Fund (AdFutura)
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/171037/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Integrated and Interdisciplinary Research (IIR or III)/41011/RS//
dc.rightsrestrictedAccess
dc.sourceJournal of Physics D-Applied Physics
dc.titlePlasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactoren
dc.typearticle
dc.rights.licenseARR
dc.citation.issue7
dc.citation.other46(7): -
dc.citation.rankM21
dc.citation.volume46
dc.identifier.doi10.1088/0022-3727/46/7/075201
dc.identifier.scopus2-s2.0-84873633959
dc.identifier.wos000314471900014
dc.type.versionpublishedVersion


Документи

Thumbnail

Овај документ се појављује у следећим колекцијама

Приказ основних података о документу