Polyimide structures for micro-electro-mechanical system (mems) - based applications.
Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima
2016
Аутори
Đakov, TatjanaОстала ауторства
Popović, IvankaRajaković, Ljubinka V.
Radojević, Vesna
Kalagasidis Krušić, Melina
Jović, Vesna
Докторска теза (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This Ph.D. thesis studies and experimentally examines applicability of thin polymer films as structural substitutes for crystaline Si in bimorph MEMS structures. The two shapes (bi - morph) and transient state between the ON - OFF resting positions, that such deformable MEMS structures assume, largely depend on thermo-mechanical characteristics of the structural materials, influencing response time, efficiency and delivered force and/or sensitivity. For the first time, thermal characteristics (e.g. Coefficent of Thermal Expansion (CTE) and the Glass Transient Temperature Tg) of trully thin (2m – 10m) polyimide (PI) films have been examined and the relationship with respect to film thickness and film coating processing parameters (e.g. soft - baking and hard-baking temperature profiles) has been established. The correlations between the film thickness and respective CTEs - , as well as respective glass transition temperatures, Tgs have been experimentally established. Experimentall...y established thermo - mechanical characteristics of PI films were then used for software simulation, functionalisation and modelling of the next generation of bimorph microsensors and microactuators based on PI - metal and PI - PI architecture...
U okviru ove doktorske disertacije proučena je i eksperimentalno ispitana mogućnost primene tankih polimernih filmova kao zamene za silicijum kod bimorfnih MEMS struktura. Ponašanje deformabilnih bimorfnih MEMS struktura (oblik, položaj u mirovanju i u stanju pobude) veoma zavisi od termomehaničkih karakteristika samih strukturnih materijala, a koje samim tim imaju uticaja i na vreme odziva, efikasnost i primenjenu snagu i/ili osetljivost. Prvi put su u radu ispitivane toplotne karakteristike (koeficijent toplotnog širenja, , i temperatura prelaza u staklasto stanje, Tg) tankih poliimidnih filmova (2 m - 10 m) u zavisnosti od debljine filma i procesnih parametara (temperature umrežavanja, kao i temperaturnog profila koji je korišćen pri umrežavanju polimera). Na osnovu eksperimentalnih podataka izvedene su korelacije izmeĎu debljine filma i koeficijenta toplotnog širenja, , kao i temperature prelaza u staklasto stanje, Tg. Pomoću toplotnih karakteristika PI filmova izvršena je simu...lacija, funkcionalizacija i modelovanje nove generacije bimorfnih mikrosenzora i mikropokretača tipa metal - poliimid i poliimid - poliimid...
Кључне речи:
Thin polymer films / polyimide / micro-electro-mechanical systems (MEMS) / bimorph structure / Tanki polimerni filmovi / poliimid / mikro-elektro-mehanički sistemi (MEMS) / bimorfne struktureИзвор:
2016Издавач:
- Univerzitet u Beogradu, Tehnološko-metalurški fakultet
URI
http://eteze.bg.ac.rs/application/showtheses?thesesId=4620https://fedorabg.bg.ac.rs/fedora/get/o:14753/bdef:Content/download
http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=48697871
http://TechnoRep.tmf.bg.ac.rs/handle/123456789/4645
Колекције
Институција/група
Tehnološko-metalurški fakultetTY - THES AU - Đakov, Tatjana PY - 2016 UR - http://eteze.bg.ac.rs/application/showtheses?thesesId=4620 UR - https://fedorabg.bg.ac.rs/fedora/get/o:14753/bdef:Content/download UR - http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=48697871 UR - http://TechnoRep.tmf.bg.ac.rs/handle/123456789/4645 AB - This Ph.D. thesis studies and experimentally examines applicability of thin polymer films as structural substitutes for crystaline Si in bimorph MEMS structures. The two shapes (bi - morph) and transient state between the ON - OFF resting positions, that such deformable MEMS structures assume, largely depend on thermo-mechanical characteristics of the structural materials, influencing response time, efficiency and delivered force and/or sensitivity. For the first time, thermal characteristics (e.g. Coefficent of Thermal Expansion (CTE) and the Glass Transient Temperature Tg) of trully thin (2m – 10m) polyimide (PI) films have been examined and the relationship with respect to film thickness and film coating processing parameters (e.g. soft - baking and hard-baking temperature profiles) has been established. The correlations between the film thickness and respective CTEs - , as well as respective glass transition temperatures, Tgs have been experimentally established. Experimentally established thermo - mechanical characteristics of PI films were then used for software simulation, functionalisation and modelling of the next generation of bimorph microsensors and microactuators based on PI - metal and PI - PI architecture... AB - U okviru ove doktorske disertacije proučena je i eksperimentalno ispitana mogućnost primene tankih polimernih filmova kao zamene za silicijum kod bimorfnih MEMS struktura. Ponašanje deformabilnih bimorfnih MEMS struktura (oblik, položaj u mirovanju i u stanju pobude) veoma zavisi od termomehaničkih karakteristika samih strukturnih materijala, a koje samim tim imaju uticaja i na vreme odziva, efikasnost i primenjenu snagu i/ili osetljivost. Prvi put su u radu ispitivane toplotne karakteristike (koeficijent toplotnog širenja, , i temperatura prelaza u staklasto stanje, Tg) tankih poliimidnih filmova (2 m - 10 m) u zavisnosti od debljine filma i procesnih parametara (temperature umrežavanja, kao i temperaturnog profila koji je korišćen pri umrežavanju polimera). Na osnovu eksperimentalnih podataka izvedene su korelacije izmeĎu debljine filma i koeficijenta toplotnog širenja, , kao i temperature prelaza u staklasto stanje, Tg. Pomoću toplotnih karakteristika PI filmova izvršena je simulacija, funkcionalizacija i modelovanje nove generacije bimorfnih mikrosenzora i mikropokretača tipa metal - poliimid i poliimid - poliimid... PB - Univerzitet u Beogradu, Tehnološko-metalurški fakultet T1 - Polyimide structures for micro-electro-mechanical system (mems) - based applications. T1 - Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima UR - https://hdl.handle.net/21.15107/rcub_technorep_4645 ER -
@phdthesis{ author = "Đakov, Tatjana", year = "2016", abstract = "This Ph.D. thesis studies and experimentally examines applicability of thin polymer films as structural substitutes for crystaline Si in bimorph MEMS structures. The two shapes (bi - morph) and transient state between the ON - OFF resting positions, that such deformable MEMS structures assume, largely depend on thermo-mechanical characteristics of the structural materials, influencing response time, efficiency and delivered force and/or sensitivity. For the first time, thermal characteristics (e.g. Coefficent of Thermal Expansion (CTE) and the Glass Transient Temperature Tg) of trully thin (2m – 10m) polyimide (PI) films have been examined and the relationship with respect to film thickness and film coating processing parameters (e.g. soft - baking and hard-baking temperature profiles) has been established. The correlations between the film thickness and respective CTEs - , as well as respective glass transition temperatures, Tgs have been experimentally established. Experimentally established thermo - mechanical characteristics of PI films were then used for software simulation, functionalisation and modelling of the next generation of bimorph microsensors and microactuators based on PI - metal and PI - PI architecture..., U okviru ove doktorske disertacije proučena je i eksperimentalno ispitana mogućnost primene tankih polimernih filmova kao zamene za silicijum kod bimorfnih MEMS struktura. Ponašanje deformabilnih bimorfnih MEMS struktura (oblik, položaj u mirovanju i u stanju pobude) veoma zavisi od termomehaničkih karakteristika samih strukturnih materijala, a koje samim tim imaju uticaja i na vreme odziva, efikasnost i primenjenu snagu i/ili osetljivost. Prvi put su u radu ispitivane toplotne karakteristike (koeficijent toplotnog širenja, , i temperatura prelaza u staklasto stanje, Tg) tankih poliimidnih filmova (2 m - 10 m) u zavisnosti od debljine filma i procesnih parametara (temperature umrežavanja, kao i temperaturnog profila koji je korišćen pri umrežavanju polimera). Na osnovu eksperimentalnih podataka izvedene su korelacije izmeĎu debljine filma i koeficijenta toplotnog širenja, , kao i temperature prelaza u staklasto stanje, Tg. Pomoću toplotnih karakteristika PI filmova izvršena je simulacija, funkcionalizacija i modelovanje nove generacije bimorfnih mikrosenzora i mikropokretača tipa metal - poliimid i poliimid - poliimid...", publisher = "Univerzitet u Beogradu, Tehnološko-metalurški fakultet", title = "Polyimide structures for micro-electro-mechanical system (mems) - based applications., Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima", url = "https://hdl.handle.net/21.15107/rcub_technorep_4645" }
Đakov, T.. (2016). Polyimide structures for micro-electro-mechanical system (mems) - based applications.. Univerzitet u Beogradu, Tehnološko-metalurški fakultet.. https://hdl.handle.net/21.15107/rcub_technorep_4645
Đakov T. Polyimide structures for micro-electro-mechanical system (mems) - based applications.. 2016;. https://hdl.handle.net/21.15107/rcub_technorep_4645 .
Đakov, Tatjana, "Polyimide structures for micro-electro-mechanical system (mems) - based applications." (2016), https://hdl.handle.net/21.15107/rcub_technorep_4645 .