Deposition of the DLC Structures In The Low-pressure Oxy-acetylene Flat Flame

Abstract

The morphology and phase composition of the diamond-like carbon (DLC) structures as a function of a deposition process parameters are investigated. The DLC was deposited in the low-pressure oxy-acetylene flat flame onto molybdenium substrates. It was done with the designed flame burner by spreading the flame over the area of 40 mm in diameter with the overall acetylene and oxygen flow up to 4 l/min and by changing the substrate distance and the O2/C2H2 ratio. The morphology and the phase composition of the DLC coatings sighnificantly depend on the deposition parameters, especially on the O2/C2H2 ratio.