Processing of ferroelectric thin layers of barium titanate by the sol-gel method

Abstract

The influence of various processing parameters is investigated during sol formation (metal precursors: titanium (IV) butoxide, barium hydroxide, barium acetate; pH of sol solution; type and amount of stabiliser and solvent; amount of water) and on the properties of the resulting gel. A relationship is established between sol-gel structure and the temperatures of BaTiO3 crystallisation and the structured evolution of layers deposited on the substrate Si (100). Experiments revealed the stable and suitable BaTiO3 Sol structures, responsible for low temperature crystallisation of BaTiO3. The IR, DTA and XRD analysis provide sample characterisation. The obtained results show that by using titanium (IV) butoxide and barium hydroxide monohydrate may be obtained a thin BaTiO3 layer at the low crystallisation temperatures, between 600 and 700 degrees C, with only the tetragonal phase of barium titanate present.