Effect of substrate type on microhardness of multilayer thin film composite system
Апстракт
Thin metallic multilayer films consisting of nanometer layer thickness deposited on different substrates have shown promising mechanical, electrical and magnetical properties, especially for applications in fabrication of microelectromechanical (MEMS) structures and wear-resistant applications. Electrodeposition of Ni/Cu multilayer films on substrates of (111)-oriented single crystal Si and 100μm-thick electrodeposited Ni film was carried out using dual-bath technique (DBT). The current density values was maintained at 10 mA cm-2 and projected thickness of deposit was 5μm. Vickers microhardness of Ni/Cu thin multilayer films was investigated. The substrate starts to contribute the measured hardness at penetration depths of the order of 0.07 - 0.20 times the film thickness. The measured “composite hardness” is a complex value that depends on the microstructure and the hardness of the film and the substrate and their relative differences. Ni/Cu films on (111)-oriented Si wafer and 100μm-...thick electrodeposited Ni film as the substrates can be thought as “soft film on hard substrate” composite systems. Chicot-Lesage model based on the model for reinforced composites can be applied to experimental data for all specimen and the film hardness was calculated for each indentation diagonal. The values obtained for the film hardness HF are not constant for all types of these composite systems, but influenced by the applied load.
Кључне речи:
Composite metallic multilayer films / Vickers microhardness / Composite hardness modelsИзвор:
Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrad, 2014, 680-683Издавач:
- Belgrade : Military Technical Institute
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
Институција/група
Tehnološko-metalurški fakultetTY - CONF AU - Lamovec, Jelena AU - Jović, Vesna AU - Mladenović, Ivana AU - Popović, Bogdan AU - Radojević, Vesna PY - 2014 UR - http://TechnoRep.tmf.bg.ac.rs/handle/123456789/2563 AB - Thin metallic multilayer films consisting of nanometer layer thickness deposited on different substrates have shown promising mechanical, electrical and magnetical properties, especially for applications in fabrication of microelectromechanical (MEMS) structures and wear-resistant applications. Electrodeposition of Ni/Cu multilayer films on substrates of (111)-oriented single crystal Si and 100μm-thick electrodeposited Ni film was carried out using dual-bath technique (DBT). The current density values was maintained at 10 mA cm-2 and projected thickness of deposit was 5μm. Vickers microhardness of Ni/Cu thin multilayer films was investigated. The substrate starts to contribute the measured hardness at penetration depths of the order of 0.07 - 0.20 times the film thickness. The measured “composite hardness” is a complex value that depends on the microstructure and the hardness of the film and the substrate and their relative differences. Ni/Cu films on (111)-oriented Si wafer and 100μm-thick electrodeposited Ni film as the substrates can be thought as “soft film on hard substrate” composite systems. Chicot-Lesage model based on the model for reinforced composites can be applied to experimental data for all specimen and the film hardness was calculated for each indentation diagonal. The values obtained for the film hardness HF are not constant for all types of these composite systems, but influenced by the applied load. PB - Belgrade : Military Technical Institute C3 - Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrad T1 - Effect of substrate type on microhardness of multilayer thin film composite system EP - 683 SP - 680 UR - https://hdl.handle.net/21.15107/rcub_technorep_2563 ER -
@conference{ author = "Lamovec, Jelena and Jović, Vesna and Mladenović, Ivana and Popović, Bogdan and Radojević, Vesna", year = "2014", abstract = "Thin metallic multilayer films consisting of nanometer layer thickness deposited on different substrates have shown promising mechanical, electrical and magnetical properties, especially for applications in fabrication of microelectromechanical (MEMS) structures and wear-resistant applications. Electrodeposition of Ni/Cu multilayer films on substrates of (111)-oriented single crystal Si and 100μm-thick electrodeposited Ni film was carried out using dual-bath technique (DBT). The current density values was maintained at 10 mA cm-2 and projected thickness of deposit was 5μm. Vickers microhardness of Ni/Cu thin multilayer films was investigated. The substrate starts to contribute the measured hardness at penetration depths of the order of 0.07 - 0.20 times the film thickness. The measured “composite hardness” is a complex value that depends on the microstructure and the hardness of the film and the substrate and their relative differences. Ni/Cu films on (111)-oriented Si wafer and 100μm-thick electrodeposited Ni film as the substrates can be thought as “soft film on hard substrate” composite systems. Chicot-Lesage model based on the model for reinforced composites can be applied to experimental data for all specimen and the film hardness was calculated for each indentation diagonal. The values obtained for the film hardness HF are not constant for all types of these composite systems, but influenced by the applied load.", publisher = "Belgrade : Military Technical Institute", journal = "Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrad", title = "Effect of substrate type on microhardness of multilayer thin film composite system", pages = "683-680", url = "https://hdl.handle.net/21.15107/rcub_technorep_2563" }
Lamovec, J., Jović, V., Mladenović, I., Popović, B.,& Radojević, V.. (2014). Effect of substrate type on microhardness of multilayer thin film composite system. in Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrad Belgrade : Military Technical Institute., 680-683. https://hdl.handle.net/21.15107/rcub_technorep_2563
Lamovec J, Jović V, Mladenović I, Popović B, Radojević V. Effect of substrate type on microhardness of multilayer thin film composite system. in Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrad. 2014;:680-683. https://hdl.handle.net/21.15107/rcub_technorep_2563 .
Lamovec, Jelena, Jović, Vesna, Mladenović, Ivana, Popović, Bogdan, Radojević, Vesna, "Effect of substrate type on microhardness of multilayer thin film composite system" in Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrad (2014):680-683, https://hdl.handle.net/21.15107/rcub_technorep_2563 .