Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor

Abstract

A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement.