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dc.creatorPetrović, Zoran Lj
dc.creatorRadmilović-Radenović, M.
dc.creatorMaguire, P.
dc.creatorRadetić, Maja
dc.creatorPuač, N.
dc.creatorMarić, D.
dc.creatorRadenović, B.
dc.creatorMalović, Gordana
dc.date.accessioned2021-03-10T11:13:53Z
dc.date.available2021-03-10T11:13:53Z
dc.date.issued2010
dc.identifier.urihttp://TechnoRep.tmf.bg.ac.rs/handle/123456789/1561
dc.description.abstractIn this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.en
dc.publisher2010 27th International Conference on Microelectronics, MIEL 2010
dc.rightsrestrictedAccess
dc.source2010 27th International Conference on Microelectronics, MIEL 2010 - Proceedings
dc.titleApplication of non-equilibrium plasmas in top-down and bottom-up nanotechnologies and biomedicineen
dc.typearticle
dc.rights.licenseARR
dc.citation.epage36
dc.citation.other: 29-36
dc.citation.spage29
dc.identifier.doi10.1109/MIEL.2010.5490535
dc.identifier.pmid
dc.identifier.rcubconv_6748
dc.identifier.scopus2-s2.0-77955214614
dc.type.versionpublishedVersion


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