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Polyimide structures for micro-electro-mechanical system (mems) - based applications. / Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima
(Univerzitet u Beogradu, Tehnološko-metalurški fakultet, 2016)
This Ph.D. thesis studies and experimentally examines applicability of thin polymer films as structural substitutes for crystaline Si in bimorph MEMS structures. The two shapes (bi - morph) and transient state between the ...