PZT thin films of composition Pb(Zr0.52Ti0.48)O-3 were prepared by a novel method from the suspension of nanocrystalline PZT powders. The powders were obtained by mechanochemical synthesis. Films were deposited on silicon (100) and platinum covered silicon substrates (Pt (111) /Ti/SiO2/Si) Using spin-on technique. Substrate type has influence on films crystallinity, orientation and can react with the films changing its phase composition. Films microstructure strongly depends on thermal treatment conditions due to phase and compositional changes of the films.
Ključne reči:
suspension / PZT / microstructure-final / films
Izvor:
Journal of the European Ceramic Society, 2004, 24, 6, 1945-1948
TY - JOUR
AU - Branković, Zorica
AU - Branković, Goran
AU - Varela, JA
PY - 2004
UR - http://TechnoRep.tmf.bg.ac.rs/handle/123456789/5412
AB - PZT thin films of composition Pb(Zr0.52Ti0.48)O-3 were prepared by a novel method from the suspension of nanocrystalline PZT powders. The powders were obtained by mechanochemical synthesis. Films were deposited on silicon (100) and platinum covered silicon substrates (Pt (111) /Ti/SiO2/Si) Using spin-on technique. Substrate type has influence on films crystallinity, orientation and can react with the films changing its phase composition. Films microstructure strongly depends on thermal treatment conditions due to phase and compositional changes of the films.
PB - Elsevier Sci Ltd, Oxford
T2 - Journal of the European Ceramic Society
T1 - Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders
EP - 1948
IS - 6
SP - 1945
VL - 24
DO - 10.1016/S0955-2219(03)00541-7
ER -
@article{
author = "Branković, Zorica and Branković, Goran and Varela, JA",
year = "2004",
abstract = "PZT thin films of composition Pb(Zr0.52Ti0.48)O-3 were prepared by a novel method from the suspension of nanocrystalline PZT powders. The powders were obtained by mechanochemical synthesis. Films were deposited on silicon (100) and platinum covered silicon substrates (Pt (111) /Ti/SiO2/Si) Using spin-on technique. Substrate type has influence on films crystallinity, orientation and can react with the films changing its phase composition. Films microstructure strongly depends on thermal treatment conditions due to phase and compositional changes of the films.",
publisher = "Elsevier Sci Ltd, Oxford",
journal = "Journal of the European Ceramic Society",
title = "Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders",
pages = "1948-1945",
number = "6",
volume = "24",
doi = "10.1016/S0955-2219(03)00541-7"
}
Branković, Z., Branković, G.,& Varela, J.. (2004). Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders. in Journal of the European Ceramic Society
Elsevier Sci Ltd, Oxford., 24(6), 1945-1948.
https://doi.org/10.1016/S0955-2219(03)00541-7
Branković Z, Branković G, Varela J. Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders. in Journal of the European Ceramic Society. 2004;24(6):1945-1948.
doi:10.1016/S0955-2219(03)00541-7 .
Branković, Zorica, Branković, Goran, Varela, JA, "Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders" in Journal of the European Ceramic Society, 24, no. 6 (2004):1945-1948,
https://doi.org/10.1016/S0955-2219(03)00541-7 . .
