A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement.
Keywords:
Co-C-O layers / PACVD / Process modelling / Simulation
Source:
Surface and Coatings Technology, 2006, 200, 16-17, 4816-4824
Publisher:
Elsevier
Funding / projects:
This work has been supported by the Ministry of Science and Ecology, Republic of Serbia.
TY - JOUR
AU - Raić, Karlo T.
PY - 2006
UR - http://TechnoRep.tmf.bg.ac.rs/handle/123456789/5453
AB - A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement.
PB - Elsevier
T2 - Surface and Coatings Technology
T1 - Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor
EP - 4824
IS - 16-17
SP - 4816
VL - 200
DO - 10.1016/j.surfcoat.2005.04.049
ER -
@article{
author = "Raić, Karlo T.",
year = "2006",
abstract = "A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement.",
publisher = "Elsevier",
journal = "Surface and Coatings Technology",
title = "Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor",
pages = "4824-4816",
number = "16-17",
volume = "200",
doi = "10.1016/j.surfcoat.2005.04.049"
}
Raić, K. T.. (2006). Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor. in Surface and Coatings Technology
Elsevier., 200(16-17), 4816-4824.
https://doi.org/10.1016/j.surfcoat.2005.04.049
Raić KT. Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor. in Surface and Coatings Technology. 2006;200(16-17):4816-4824.
doi:10.1016/j.surfcoat.2005.04.049 .
Raić, Karlo T., "Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor" in Surface and Coatings Technology, 200, no. 16-17 (2006):4816-4824,
https://doi.org/10.1016/j.surfcoat.2005.04.049 . .
