Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor
Само за регистроване кориснике
2006
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement.
Кључне речи:
Co-C-O layers / PACVD / Process modelling / SimulationИзвор:
Surface and Coatings Technology, 2006, 200, 16-17, 4816-4824Издавач:
- Elsevier
Финансирање / пројекти:
- This work has been supported by the Ministry of Science and Ecology, Republic of Serbia.
DOI: 10.1016/j.surfcoat.2005.04.049
ISSN: 0257-8972
WoS: 000236590300022
Scopus: 2-s2.0-33644967005
Институција/група
Tehnološko-metalurški fakultetTY - JOUR AU - Raić, Karlo T. PY - 2006 UR - http://TechnoRep.tmf.bg.ac.rs/handle/123456789/5453 AB - A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement. PB - Elsevier T2 - Surface and Coatings Technology T1 - Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor EP - 4824 IS - 16-17 SP - 4816 VL - 200 DO - 10.1016/j.surfcoat.2005.04.049 ER -
@article{ author = "Raić, Karlo T.", year = "2006", abstract = "A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement.", publisher = "Elsevier", journal = "Surface and Coatings Technology", title = "Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor", pages = "4824-4816", number = "16-17", volume = "200", doi = "10.1016/j.surfcoat.2005.04.049" }
Raić, K. T.. (2006). Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor. in Surface and Coatings Technology Elsevier., 200(16-17), 4816-4824. https://doi.org/10.1016/j.surfcoat.2005.04.049
Raić KT. Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor. in Surface and Coatings Technology. 2006;200(16-17):4816-4824. doi:10.1016/j.surfcoat.2005.04.049 .
Raić, Karlo T., "Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor" in Surface and Coatings Technology, 200, no. 16-17 (2006):4816-4824, https://doi.org/10.1016/j.surfcoat.2005.04.049 . .