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Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor
dc.creator | Raić, Karlo T. | |
dc.date.accessioned | 2023-01-18T10:02:28Z | |
dc.date.available | 2023-01-18T10:02:28Z | |
dc.date.issued | 2006 | |
dc.identifier.issn | 0257-8972 | |
dc.identifier.uri | http://TechnoRep.tmf.bg.ac.rs/handle/123456789/5453 | |
dc.description.abstract | A modelling procedure for Co-C-O layers generated on steel C35 from cobalt(II) acetylacetonate by PACVD is suggested. The investigations were carried out in a parallel plate reactor, under a radio frequency (13.56 MHz) plasma, with low ionization (ionization degree 10 -7 -10 -6 , electron temperature 5 eV, electron density 0.6·10 15 to 1.8·10 15 m -3 ) and at the pressure of 100-400 Pa. Deposition rate phenomena are estimated according to the semi-theoretical concept based on laminar boundary layer theory. On the other side, in active plasma, the concept of steady-state diffusion with concentration source/sink is used to substitute the net deviation of characteristic concentration flow in plasma above the substrate. Calculation and experimental results show good agreement. | sr |
dc.language.iso | en | sr |
dc.publisher | Elsevier | sr |
dc.relation | This work has been supported by the Ministry of Science and Ecology, Republic of Serbia. | sr |
dc.rights | restrictedAccess | sr |
dc.source | Surface and Coatings Technology | sr |
dc.subject | Co-C-O layers | sr |
dc.subject | PACVD | sr |
dc.subject | Process modelling | sr |
dc.subject | Simulation | sr |
dc.title | Modelling of plasma activated CVD of Co-C-O layers in parallel plate reactor | sr |
dc.type | article | sr |
dc.rights.license | ARR | sr |
dc.citation.epage | 4824 | |
dc.citation.issue | 16-17 | |
dc.citation.rank | M21 | |
dc.citation.spage | 4816 | |
dc.citation.volume | 200 | |
dc.identifier.doi | 10.1016/j.surfcoat.2005.04.049 | |
dc.identifier.scopus | 2-s2.0-33644967005 | |
dc.identifier.wos | 000236590300022 | |
dc.type.version | publishedVersion | sr |