Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors

Abstract

Lanthanum nickel oxide (LaNiO3) is an electrically conductive ceramics, which has a potential use as electrode for ferroelectric thin films, multilayer actuators and many other electronic devices. In this work, LaNiO3 thin films were prepared by a modified Pechini process, based on polymeric citrate precursors. DTA analysis of the precursor solution showed that formation and crystallization of LaNiO3 were completed up to 790 degrees C. Films were deposited using spin-on technique and thermally treated in temperature range 600-800 degrees C, with heating rate of 1 degrees/min. Processing parameters, such as concentration and annealing temperature, as well as number of deposited layers were optimized to achieve desired film quality. The structure of LaNiO3 was confirmed by X-ray diffraction analysis, whereas microstructural parameters, such as grain size and roughness, were analyzed by AFM.