Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor
Само за регистроване кориснике
2013
Аутори
Lazović, SašaPuač, Nevena
Spasić, Kosta
Malović, Gordana
Cvelbar, Uros
Mozetić, Miran
Radetić, Maja
Petrović, Zoran Lj
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
We have developed a large-volume low-pressure cylindrical plasma reactor with a size that matches industrial reactors for treatment of textiles. It was shown that it efficiently produces plasmas with only a small increase in power as compared with a similar reactor with 50 times smaller volume. Plasma generated at 13.56MHz was stable from transition to streamers and capable of long-term continuous operation. An industrial-scale asymmetric cylindrical reactor of simple design and construction enabled good control over a wide range of active plasma species and ion concentrations. Detailed characterization of the discharge was performed using derivative, Langmuir and catalytic probes which enabled determination of the optimal sets of plasma parameters necessary for successful industry implementation and process control. Since neutral atomic oxygen plays a major role in many of the material processing applications, its spatial profile was measured using nickel catalytic probe over a wide r...ange of plasma parameters. The spatial profiles show diffusion profiles with particle production close to the powered electrode and significant wall losses due to surface recombination. Oxygen atom densities range from 10(19) m(-3) near the powered electrode to 10(17) m(-3) near the wall. The concentrations of ions at the same time are changing from 10(16) to the 10(15) m(-3) at the grounded chamber wall.
Извор:
Journal of Physics D-Applied Physics, 2013, 46, 7Издавач:
- IOP Publishing Ltd, Bristol
Финансирање / пројекти:
- Slovenian Research Agency (ARRS)Slovenian Research Agency - Slovenia
- Slovenian Human Resources Development and Scholarship Fund (AdFutura)
- Фундаментални процеси и примене транспорта честица у неравнотежним плазмама, траповима и наноструктурама (RS-MESTD-Basic Research (BR or ON)-171037)
- Примене нискотемпературних плазми у биомедицини, заштити човекове околине и нанотехнологијама (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-41011)
DOI: 10.1088/0022-3727/46/7/075201
ISSN: 0022-3727
WoS: 000314471900014
Scopus: 2-s2.0-84873633959
Институција/група
Tehnološko-metalurški fakultetTY - JOUR AU - Lazović, Saša AU - Puač, Nevena AU - Spasić, Kosta AU - Malović, Gordana AU - Cvelbar, Uros AU - Mozetić, Miran AU - Radetić, Maja AU - Petrović, Zoran Lj PY - 2013 UR - http://TechnoRep.tmf.bg.ac.rs/handle/123456789/2489 AB - We have developed a large-volume low-pressure cylindrical plasma reactor with a size that matches industrial reactors for treatment of textiles. It was shown that it efficiently produces plasmas with only a small increase in power as compared with a similar reactor with 50 times smaller volume. Plasma generated at 13.56MHz was stable from transition to streamers and capable of long-term continuous operation. An industrial-scale asymmetric cylindrical reactor of simple design and construction enabled good control over a wide range of active plasma species and ion concentrations. Detailed characterization of the discharge was performed using derivative, Langmuir and catalytic probes which enabled determination of the optimal sets of plasma parameters necessary for successful industry implementation and process control. Since neutral atomic oxygen plays a major role in many of the material processing applications, its spatial profile was measured using nickel catalytic probe over a wide range of plasma parameters. The spatial profiles show diffusion profiles with particle production close to the powered electrode and significant wall losses due to surface recombination. Oxygen atom densities range from 10(19) m(-3) near the powered electrode to 10(17) m(-3) near the wall. The concentrations of ions at the same time are changing from 10(16) to the 10(15) m(-3) at the grounded chamber wall. PB - IOP Publishing Ltd, Bristol T2 - Journal of Physics D-Applied Physics T1 - Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor IS - 7 VL - 46 DO - 10.1088/0022-3727/46/7/075201 ER -
@article{ author = "Lazović, Saša and Puač, Nevena and Spasić, Kosta and Malović, Gordana and Cvelbar, Uros and Mozetić, Miran and Radetić, Maja and Petrović, Zoran Lj", year = "2013", abstract = "We have developed a large-volume low-pressure cylindrical plasma reactor with a size that matches industrial reactors for treatment of textiles. It was shown that it efficiently produces plasmas with only a small increase in power as compared with a similar reactor with 50 times smaller volume. Plasma generated at 13.56MHz was stable from transition to streamers and capable of long-term continuous operation. An industrial-scale asymmetric cylindrical reactor of simple design and construction enabled good control over a wide range of active plasma species and ion concentrations. Detailed characterization of the discharge was performed using derivative, Langmuir and catalytic probes which enabled determination of the optimal sets of plasma parameters necessary for successful industry implementation and process control. Since neutral atomic oxygen plays a major role in many of the material processing applications, its spatial profile was measured using nickel catalytic probe over a wide range of plasma parameters. The spatial profiles show diffusion profiles with particle production close to the powered electrode and significant wall losses due to surface recombination. Oxygen atom densities range from 10(19) m(-3) near the powered electrode to 10(17) m(-3) near the wall. The concentrations of ions at the same time are changing from 10(16) to the 10(15) m(-3) at the grounded chamber wall.", publisher = "IOP Publishing Ltd, Bristol", journal = "Journal of Physics D-Applied Physics", title = "Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor", number = "7", volume = "46", doi = "10.1088/0022-3727/46/7/075201" }
Lazović, S., Puač, N., Spasić, K., Malović, G., Cvelbar, U., Mozetić, M., Radetić, M.,& Petrović, Z. L.. (2013). Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor. in Journal of Physics D-Applied Physics IOP Publishing Ltd, Bristol., 46(7). https://doi.org/10.1088/0022-3727/46/7/075201
Lazović S, Puač N, Spasić K, Malović G, Cvelbar U, Mozetić M, Radetić M, Petrović ZL. Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor. in Journal of Physics D-Applied Physics. 2013;46(7). doi:10.1088/0022-3727/46/7/075201 .
Lazović, Saša, Puač, Nevena, Spasić, Kosta, Malović, Gordana, Cvelbar, Uros, Mozetić, Miran, Radetić, Maja, Petrović, Zoran Lj, "Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor" in Journal of Physics D-Applied Physics, 46, no. 7 (2013), https://doi.org/10.1088/0022-3727/46/7/075201 . .