Polyimide structures for micro-electro-mechanical system (mems) - based applications.
Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima
dc.contributor.advisor | Popović, Ivanka | |
dc.contributor.advisor | Rajaković, Ljubinka V. | |
dc.contributor.other | Radojević, Vesna | |
dc.contributor.other | Kalagasidis Krušić, Melina | |
dc.contributor.other | Jović, Vesna | |
dc.creator | Đakov, Tatjana | |
dc.date.accessioned | 2021-03-10T15:13:18Z | |
dc.date.available | 2021-03-10T15:13:18Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | http://eteze.bg.ac.rs/application/showtheses?thesesId=4620 | |
dc.identifier.uri | https://fedorabg.bg.ac.rs/fedora/get/o:14753/bdef:Content/download | |
dc.identifier.uri | http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=48697871 | |
dc.identifier.uri | http://TechnoRep.tmf.bg.ac.rs/handle/123456789/4645 | |
dc.description.abstract | This Ph.D. thesis studies and experimentally examines applicability of thin polymer films as structural substitutes for crystaline Si in bimorph MEMS structures. The two shapes (bi - morph) and transient state between the ON - OFF resting positions, that such deformable MEMS structures assume, largely depend on thermo-mechanical characteristics of the structural materials, influencing response time, efficiency and delivered force and/or sensitivity. For the first time, thermal characteristics (e.g. Coefficent of Thermal Expansion (CTE) and the Glass Transient Temperature Tg) of trully thin (2m – 10m) polyimide (PI) films have been examined and the relationship with respect to film thickness and film coating processing parameters (e.g. soft - baking and hard-baking temperature profiles) has been established. The correlations between the film thickness and respective CTEs - , as well as respective glass transition temperatures, Tgs have been experimentally established. Experimentally established thermo - mechanical characteristics of PI films were then used for software simulation, functionalisation and modelling of the next generation of bimorph microsensors and microactuators based on PI - metal and PI - PI architecture... | en |
dc.description.abstract | U okviru ove doktorske disertacije proučena je i eksperimentalno ispitana mogućnost primene tankih polimernih filmova kao zamene za silicijum kod bimorfnih MEMS struktura. Ponašanje deformabilnih bimorfnih MEMS struktura (oblik, položaj u mirovanju i u stanju pobude) veoma zavisi od termomehaničkih karakteristika samih strukturnih materijala, a koje samim tim imaju uticaja i na vreme odziva, efikasnost i primenjenu snagu i/ili osetljivost. Prvi put su u radu ispitivane toplotne karakteristike (koeficijent toplotnog širenja, , i temperatura prelaza u staklasto stanje, Tg) tankih poliimidnih filmova (2 m - 10 m) u zavisnosti od debljine filma i procesnih parametara (temperature umrežavanja, kao i temperaturnog profila koji je korišćen pri umrežavanju polimera). Na osnovu eksperimentalnih podataka izvedene su korelacije izmeĎu debljine filma i koeficijenta toplotnog širenja, , kao i temperature prelaza u staklasto stanje, Tg. Pomoću toplotnih karakteristika PI filmova izvršena je simulacija, funkcionalizacija i modelovanje nove generacije bimorfnih mikrosenzora i mikropokretača tipa metal - poliimid i poliimid - poliimid... | sr |
dc.publisher | Univerzitet u Beogradu, Tehnološko-metalurški fakultet | |
dc.rights | openAccess | |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/4.0/ | |
dc.subject | Thin polymer films | en |
dc.subject | polyimide | en |
dc.subject | micro-electro-mechanical systems (MEMS) | en |
dc.subject | bimorph structure | en |
dc.subject | Tanki polimerni filmovi | sr |
dc.subject | poliimid | sr |
dc.subject | mikro-elektro-mehanički sistemi (MEMS) | sr |
dc.subject | bimorfne strukture | sr |
dc.title | Polyimide structures for micro-electro-mechanical system (mems) - based applications. | en |
dc.title | Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima | sr |
dc.type | doctoralThesis | |
dc.rights.license | BY-NC-ND | |
dc.identifier.fulltext | http://TechnoRep.tmf.bg.ac.rs/bitstream/id/2172/4642.pdf | |
dc.identifier.rcub | https://hdl.handle.net/21.15107/rcub_technorep_4645 | |
dc.type.version | publishedVersion |